Architectural Engineering and Construction, Durham School of

 

ORCID IDs

0000-0001-8134-4080

Date of this Version

2019

Citation

Sensors 2019, 19, 380

Comments

© 2019 by the authors.

Open access

doi:10.3390/s19020380

Abstract

Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture the response of the resonator under double resonance excitation. Therefore, we develop a coupled mechanical and electrical mathematical linearized model at different operation frequencies and validate this model experimentally. The double-resonance excitation results in a 21 times amplification of the voltage across the resonator and 31 times amplitude amplification over classical excitation schemes. This intensive experimental study showed a great potential of double resonance excitation providing a high amplitude amplification and maintaining the linearity of the system when the parasitic capacitance is maintained low.

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