Chemical and Biomolecular Engineering Research and Publications
Title
Piezoelectric sensors/actuators for use in refractory environments
Date of this Version
May 2000
Abstract
Disclosed is a piezoelectric system which demonstrates piezoelectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezoelectric system is sequentially comprised of a first electrically conductive layer, a layer of (Ta.sub.2 O.sub.5) in other than a monoclinic phase, (preferably orthorhombic demonstrating small x-ray crystalographic <0 0 1> and <1 11 0> peaks), and a second electrically conductive layer. A preferred method of fabrication involves sputter deposition of both said layer of (Ta.sub.2 O.sub.5) and said second electrically conductive layer.
COinS
This document is currently not available here.
Comments
The inventors of this patent are :Viljoen; Hendrik J. (Lincoln, NE), Jooste; Barend R. (Lincoln, NE)and any relevent information about this patent can be obtained from the following website of united states patents. United States Patent No.6,057,628