Piezoelectric sensors/actuators for use in refractory environments
Date of this Version
Disclosed is a piezoelectric system which demonstrates piezoelectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezoelectric system is sequentially comprised of a first electrically conductive layer, a layer of (Ta.sub.2 O.sub.5) in other than a monoclinic phase, (preferably orthorhombic demonstrating small x-ray crystalographic <0 0 1> and <1 11 0> peaks), and a second electrically conductive layer. A preferred method of fabrication involves sputter deposition of both said layer of (Ta.sub.2 O.sub.5) and said second electrically conductive layer.
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