Electrical Engineering, Department of
Title
Method of Calibrating Effects of Field of Classification Search Multi-AOI-System for Easy Changing Angles-of-Incidence In Ellipsometers and The Like
Document Type
Article
Date of this Version
September 2007
Abstract
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
Download
Comments
United States Patent NO.: US 7,265,838 B1. Date of Patent: *Sep. 4, 2007.