NOVEL METHODS FOR DEPOSITION OF BORON CARBIDE FILMS

Authors

J. Mazurowski, Syracuse University
S. Baral-Tosh, Syracuse University
G. Ramseyer, General Electric Co.Follow
J.T. Spencer, Syracuse University
Yoon-Gi Kim, Syracuse University
Peter A. Dowben, University of Nebraska-LincolnFollow

Date of this Version

May 1991

Comments

Published in Mat. Res. Soc. Symp. Proc. Vol. 190. © l991 Materials Research Society. Permission to use.

Abstract

By combining pentaborane (B₅H₉) and decarborane (B₁₀H₁₄) with methane in a plasma reactor, a variety of boron-carbides can be made over a wide range of compositions. The resulting thin films have uniform composition and appear to be polycrystalline.