Research Papers in Physics and Astronomy

 

Date of this Version

February 2001

Comments

Patent NO.: US 6,184,523 B1

Abstract

Disclosed is a compact, small diameter, high resolution charged particle-energy detecting, retractable cylindrical mirror analyzer system. Multiple sequential stages enable charged particle-energy detection with an improved resolution as compared to that possible where only a single stage is utilized. The relatively small size allows for positioning, via a manipulator of the cylindrical mirror analyzer system, which is attached to a linear motion feedthrough mounted on a conflat flange of a vacuum system.



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