Amplification in MEMS RLC Circuits for Enhanced Sensitivity and MEMS Applications

Authors

Mutaz Mohd Hamdi Al Fayad, University of Nebraska-LincolnFollow

First Advisor

Fadi Alsaleem

Committee Members

Moe Alahmad, Clarence Waters

Date of this Version

4-2025

Document Type

Thesis

Citation

A thesis presented to the faculty of the Graduate College at the University of Nebraska in partial fulfillment of requirements for the degree of Master of Science

Major: Architectural Engineering

Under the supervision of Professor Fadi Alsaleem

Lincoln, Nebraska, May 2025

Comments

Copyright 2025, Mutaz Mohd Hamdi Al Fayad. Used by permission

Abstract

Micro-electro-mechanical systems (MEMS) have garnered significant attention due to their unique characteristics, including small size, high sensitivity, and cost-effective mass production. While electrostatic actuation offers low power consumption, it requires high voltage to move the MEMS structure, posing a challenge for applications such as RF switches and MEMS resonator-based sensors. Reducing the required input voltage for electrostatic MEMS remains a key research focus.

This thesis investigates voltage amplification in electrostatic MEMS through integration with resonant RLC circuits. By leveraging resonance, optimized configurations are designed to maximize voltage gain and enhance the signal-to-noise ratio. Through theoretical modeling and simulations using MATLAB and Simulink, along with experimental validation, the proposed MEMS-RLC system achieved a voltage gain of 71 times from a 1 V input.

Experimental and simulation results demonstrate notable improvements in sensor performance, emphasizing the benefits of resonant amplification. This thesis concludes by summarizing contributions, acknowledging limitations, and outlining future research directions to advance resonance-enhanced MEMS technologies for sensing applications.

Advisor: Fadi Alsaleem