Chemical and Biomolecular Engineering Research and Publications


Date of this Version

May 2000


This is United States Patent no.6,057,628. Date of Patent: May 2, 2000.


pierozlectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezarlecttic system is sequentially comprised of a first electrically conductive layer, a layer of (Ta,O,) in other than a rnonoclinic phase, ipreferably onhorhombic demonstrating small x-ray crystalopraphic and peaksi. and a second slecttically conductive layer A preferred method of fabrication involves sputter deposition of both said layer of (Ta,O) md said second electrically conductive layer.