Materials Research Science and Engineering Center


Date of this Version



Published in Appl. Phys. Lett. 91, 121916 (2007). Copyright © 2007 American Institute of Physics. Used by permission.


Dielectric constants and long-wavelength optical phonon modes of amorphous hafnium aluminate films with a maximum aluminum content of 19 at. % are studied by infrared spectroscopic ellipsometry (IRSE). The hafnium aluminate films were prepared by metal organic chemical vapor deposition on silicon substrates. IRSE revealed one polar lattice mode and one impurity-type mode, which show all a systematic shift in frequency with varying Al content. The static dielectric constant decreases from 10.1 for 4.6 at. % Al to 8.1 for 19 at. % Al. The absolute values were found to be between 50% and 70% smaller than the values obtained from electrical measurements.