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FePt films have been prepared by sputtering Fe/Pt multilayers onto glass or silicon substrates. The thickness of the Fe and Pt layers was adjusted with the Fe:Pt atomic ratio from about 1:1 to 2:1. Magnetic hardening is observed after heat treatment at elevated temperatures, which led to coercivity values exceeding 20 kOe in samples with an Fe:Pt ratio around 1.2:1. The hardening originates from the formation of the tetragonal FePt phase with high magnetocrystalline anisotropy and a favorable microstructure. Two-phase composite films containing hard and soft phases were obtained when the Fe:Pt ratio increased. Under optimized processing conditions, composite films with energy products larger than 30 MG Oe at room temperature have been successfully produced.