Piezoelectric sensors/actuators for use in refractory environments

Hendrik J. Viljoen, University of Nebraska-Lincoln

Document Type Article

The inventors of this patent are :Viljoen; Hendrik J. (Lincoln, NE), Jooste; Barend R. (Lincoln, NE)and any relevent information about this patent can be obtained from the following website of united states patents. United States Patent No.6,057,628

Abstract

Disclosed is a piezoelectric system which demonstrates piezoelectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezoelectric system is sequentially comprised of a first electrically conductive layer, a layer of (Ta.sub.2 O.sub.5) in other than a monoclinic phase, (preferably orthorhombic demonstrating small x-ray crystalographic and peaks), and a second electrically conductive layer. A preferred method of fabrication involves sputter deposition of both said layer of (Ta.sub.2 O.sub.5) and said second electrically conductive layer.