Electrical & Computer Engineering, Department of
First Advisor
Eva Schubert
Second Advisor
Mathias Schubert
Date of this Version
Fall 11-29-2011
Abstract
In this thesis, in-situ ellipsometry and electroanalytical investigations of two electrochemical processes are reported: including the formation of anodically grown silicon dioxide and the intercalation of lithium into silicon. Analysis of the ellipsometry data shows that the anodically grown silicon dioxide layer is uniform and has similar properties as thermally grown silicon dioxide. The lithium-ion intercalation data reveals non-uniform thin film formation, which requires further studies and development of appropriate ellipsometric optical models.
Advisers: Eva Schubert and Mathias Schubert
Included in
Electromagnetics and Photonics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Nanotechnology Fabrication Commons, Other Engineering Commons, Other Engineering Science and Materials Commons, Power and Energy Commons, Semiconductor and Optical Materials Commons
Comments
A THESIS Presented to the Faculty of The Graduate College at the University of Nebraska In Partial Fulfillment of Requirements For the Degree of Master of Science, Major: Electrical Engineering, Under the Supervision of Professors Eva Schubert and Mathias Schubert. Lincoln, Nebraska: December 2011
Copyright (c) 2011 Eric Montgomery