Date of this Version
In this thesis, in-situ ellipsometry and electroanalytical investigations of two electrochemical processes are reported: including the formation of anodically grown silicon dioxide and the intercalation of lithium into silicon. Analysis of the ellipsometry data shows that the anodically grown silicon dioxide layer is uniform and has similar properties as thermally grown silicon dioxide. The lithium-ion intercalation data reveals non-uniform thin film formation, which requires further studies and development of appropriate ellipsometric optical models.
Advisers: Eva Schubert and Mathias Schubert
Electromagnetics and photonics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Nanotechnology fabrication Commons, Other Engineering Commons, Other Engineering Science and Materials Commons, Power and Energy Commons, Semiconductor and Optical Materials Commons