Electrical & Computer Engineering, Department of

 

Document Type

Article

Date of this Version

3-8-2005

Comments

United States Patent NO.: US 6,864,457 B1

Abstract

Disclosed are systems and methods for reducing the adverse effects of particles which become dislodged by scribing and laser machining of materials, which dislodged particles otherwise accumulate on laser machined material surfaces and cause adverse effects.

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