Electrical Engineering, Department of
Title
United States Patent: SYSTEM AND METHOD FOR COMPENSATING POLARIZATION-DEPENDENT SENSITIVITY OF DISPERSIVE OPTICS IN A ROTATING ANALYZER ELLIPSOMETER SYSTEM
Document Type
Article
Date of this Version
April 1996
Abstract
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a stationary compensator, positioned between an analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The use of a light fiber to carry light from a source thereof, to a polarization state generator, is also disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.
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Comments
United States Patent Number: 5,504,582. Date of Patent: Apr. 2,1996.