Electrical & Computer Engineering, Department of
Date of this Version
9-9-1997
Abstract
Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems. which, in use. produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.
Comments
United States Patent Number: 5,666,201. Date of Patent: *Sep. 9, 1997.