The decomposition of [Mn(CO)₅]₂(μ-SiH₂)

Authors

G.T. Stauf, Syracuse University
Peter A. Dowben, University of Nebraska-LincolnFollow
K. Emrich, Institut fur Physikalische Chemie, Freie Universitat Berlin, Takustrasse, Berlin, Federal Republic of Germany
W. Hirschwald, Institut fur Physikalische Chemie, Freie Universitat Berlin, Takustrasse, Berlin, Federal Republic of Germany
N.M. Boag, Sapord University, Sapord, England

Document Type

Article

Date of this Version

May 1989

Comments

Published in the Journal of Vacuum Science and Technology A 7 (3), May/Jun 1989. Copyright © 1989 American Vacuum Society. Used by permission. For free online abstracts, see http://www.avs.org/literature.jvst.b.aspx

Abstract

The prospect of using chemical vapor deposition to deposit mixed metals and silicides from a single source compound is attractive but largely uninvestigated. Studies of decomposition energies of such compounds are nearly nonexistent. One such compound which has successfully been used to make a silicide coating is [Mn(CO)₅ 1₂ (μ-SiH₂). We have used electron impact mass spectroscopy, photoionization mass spectroscopy, and photoabsorption to determine bond energies within this compound. The combination of methods allows a high degree of confidence in the resultant ionization and fragment appearance potentials. Some possible mechanisms of decomposition are discussed. A complete ionic decomposition thermodynamic cycle has been generated, and the results are used to illuminate the coating processes previously observed.