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Peter Dowben Publications

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Document Type

Article

Date of this Version

July 1996

Comments

United States Patent Number: 5,541,410

Abstract

A single pass cylindrical mirror analyzer for use in charged particle analysis has reduced size for mounting on a simple manipulator. The reduced size of the analyzer allows for placement of the analyzer on a linear motion feedtrough mounted on a conflat flange for insertion into and retraction from the analysis position. The reduced size of the cylindrical mirror analyzer in combination with good instrument resolution results in a versatile charged particle analyzer.

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