Atomic force microscopy-based experimental setup for studying domain switching dynamics in ferroelectric capacitors

Authors

C. DeHoff, North Carolina State University, North Carolina
B. J. Rodriguez, North Carolina State University, Campus Box 7920, Raleigh, North CarolinaFollow
A. I. Kingon, North Carolina State UniversityFollow
R. J. Nemanich, North Carolina State University, Campus Box 7920, Raleigh, North Carolina
Alexei Gruverman, University of Nebraska-LincolnFollow
J. S. Cross, Fujitsu Laboratories Ltd., Atsugi, Japan

Date of this Version

1-25-2005

Comments

Published in Rev. Sci. Instrum. 76, 023708 (2005). Copyright © 2005 American Institute of Physics. Used by permission.

Abstract

This article describes an experimental setup for combined measurements of domain switching dynamics and switching currents in micrometer scale ferroelectric capacitors. The setup is based on a commercial atomic force microscope (AFM) that is equipped with a piezoresponse mode for domain imaging and with a wide bandwidth current amplifier for switching current recording. The setup allows combined domain/current measurements in capacitors as small as 1 μm² with switching times resolved down to 10 ns. The incorporation of switching current measurement capability into piezoresponse AFM makes detailed analysis of switching behavior in ferroelectric memory devices possible.