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The effects of sputtering conditions on the structure and magnetic properties of Nd2 (Fe0.9Co0.1)14B films and multilayers are reported. The samples were sputtered onto temperature-controlled mica and Ta substrates, at temperatures between 20 and 620 °C. X-ray diffraction results indicate that films deposited directly onto 500–600 °C substrates with Fe buffer layers are nearly single-phase materials with the c axis of the grains largely perpendicular to the film plane. Room-temperature magnetization measurements to 17.4 kOe indicate that these films have strong perpendicular anisotropy with coercivities in excess of 10 kOe and magnetizations greater than 100 emu/g. Results for Nd2 (Fe0.9Co0.1 )14 B/Fe multilayers show that films can be produced with either in-plane or perpendicular anisotropy depending on the layer thicknesses. The Fe multilayers were found to have coercivities similar to those for the single layer films. Multilayers made with Ag were found to have significant interdiffusion and secondary phases. Journal of Applied Physics is copyrighted by The American Institute of Physics.