High coercivity SmFeAlC thin films fabricated by multilayer sputtering

Authors

M.L. Yan, University of Nebraska - Lincoln
Z.S. Shan, University of Nebraska - Lincoln
Yi Liu, University of Nebraska-LincolnFollow
David J. Sellmyer, University of Nebraska-LincolnFollow

Document Type

Article

Date of this Version

9-1-1997

Comments

Published by IEEE; IEEE Trans. Mag. 33, 3706 (1997). ©1997 IEEE. Permission to use. http://ieeexplore.ieee.org/

Abstract

Multilayer sputtering of SmFe/C(Al) plus appropriate thermal processing has been used to fabricate SmFeC thin films with A1 substitution for Fe. It was found that the SmFeAlC thin films exhibited exceptionally high Coercivities. A coercivity of 28 kOe was realized for the thin film with structure of Ta(l000 Å)/|SmFe(40Å)/ C(Al)(5Å)]x50/Ta(200Å) with subsequent annealing at 650°C.