Durham School of Architectural Engineering and Construction
ORCID IDs
0000-0002-1257-5093
0000-0001-8134-4080
Date of this Version
2019
Citation
Scientific Reports | (2019) 9:319
Abstract
We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.
Included in
Architectural Engineering Commons, Construction Engineering Commons, Environmental Design Commons, Other Engineering Commons
Comments
© The Author(s) 2019
Open access
DOI: 10.1038/s41598-018-36482-1