Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

N. Jaber, King Abdullah University of Science and Technology
M. A. A. Hafiz, King Abdullah University of Science and Technology
S. N. R. Kazmi, King Abdullah University of Science and Technology
M. H. Hasan, University of Nebraska - Lincoln
F. M. Alsaleem, University of Nebraska-Lincoln
S. Ilyas, King Abdullah University of Science and Technology
M. I. Younis, King Abdullah University of Science and Technology

Document Type Article

© The Author(s) 2019

Open access

Abstract

We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.