Chemical and Biomolecular Research Papers -- Faculty Authors Series


Date of this Version

May 1996


Published in Journal of Vacuum Science and Technology A 14(3), May/Jun 1996, pp. 714-719. 0734-2101/96/14(3)/714/6/$10.00 Copyright © 1996 American Vacuum Society. Used by permission.


Piezoelectric sensors can measure vibrations of solid structures very accurately. A model of a cantilevered beam, with a ZnO film on one side is presented. Both viscous and internal damping are considered. The output of the sensor is modeled and matched with experimental results by adjusting the damping parameters. A theoretical formulation for damage is introduced. Experimental results for a damaged beam confirm the shift in frequencies to lower values. The model is used to identify the extent of the damage.