Electrical & Computer Engineering, Department of


First Advisor

Eva Schubert

Second Advisor

Mathias Schubert

Date of this Version

Fall 11-29-2011


A THESIS Presented to the Faculty of The Graduate College at the University of Nebraska In Partial Fulfillment of Requirements For the Degree of Master of Science, Major: Electrical Engineering, Under the Supervision of Professors Eva Schubert and Mathias Schubert. Lincoln, Nebraska: December 2011

Copyright (c) 2011 Eric Montgomery


In this thesis, in-situ ellipsometry and electroanalytical investigations of two electrochemical processes are reported: including the formation of anodically grown silicon dioxide and the intercalation of lithium into silicon. Analysis of the ellipsometry data shows that the anodically grown silicon dioxide layer is uniform and has similar properties as thermally grown silicon dioxide. The lithium-ion intercalation data reveals non-uniform thin film formation, which requires further studies and development of appropriate ellipsometric optical models.

Advisers: Eva Schubert and Mathias Schubert