Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
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Document Type
Article
Date of this Version
3-8-2005
Abstract
Disclosed are systems and methods for reducing the adverse effects of particles which become dislodged by scribing and laser machining of materials, which dislodged particles otherwise accumulate on laser machined material surfaces and cause adverse effects.
Comments
United States Patent NO.: US 6,864,457 B1