Electrical & Computer Engineering, Department of


Date of this Version



Published in J. Vac. Sci. Technol. A 17„(5), Sep/Oct 1999. ©1999 American Vacuum Society. Used by permission.


Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031–6.1 eV.