Electrical & Computer Engineering, Department of
United States Patent: System and Method for Compensating Polarization-Dependent Sensitivity of Dispersive Optics in a Rotating Analyzer Ellipsometer System
Date of this Version
An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a rotating compensator, positioned between the analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.
United States Patent Number: 5,521,706. Date of Patent: *May 28, 1996.