Electrical & Computer Engineering, Department of


Date of this Version



Published in J. Mater. Res., Vol. 16, No. 5, May 2001 © 2001 Materials Research Society. Used by permission.


Aging properties of porous GaAs were investigated nondestructively using variable angle of incidence infrared spectroscopic ellipsometry. In addition to the thickness and volume porosity, properties of the solid part of the porous material are investigated in terms of the long-wavelength dielectric function and chemical composition. The high sensitivity is employed to detect and identify infrared resonant absorptions related to different vibration modes of cubic and amorphous As2O3. Resonances centered at 333.3, 480, 785.8, 838, and 1045.5 cm-1 are from cubic As2O3, whereas resonances centered at 350, 490, and 808.5 cm-1 are from amorphous As2O3.