Electrical & Computer Engineering, Department of


Date of this Version



Published in Published in Journal of Applied Physics 64:8 (October 15, 1988), pp. 4175-4180. Copyright The American Institute of Physics. Used by permission.


The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.