Electrical & Computer Engineering, Department of


Date of this Version



United States Patent Patent No.: US 7,746,471 B1


A substantially self-contained "on-board" material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three-dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.