Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
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Document Type
Article
Date of this Version
1-3-2006
Citation
United States Patent Patent No.: US 6,982,792 B1
Abstract
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
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