Parametric investigation of laser nanoimprinting of hemispherical cavity arrays

Authors

L. P. Li, University of Nebraska-Lincoln
Yongfeng Lu, University of Nebraska-LincolnFollow
D. W. Doerr, University of Nebraska-Lincoln
Dennis R. Alexander, University of Nebraska-LincolnFollow
X. Y. Chen, National University of Singapore

Date of this Version

11-1-2004

Comments

Published in JOURNAL OF APPLIED PHYSICS VOLUME 96, NUMBER 9. © 2004 American Institute of Physics. Used by permission.

Abstract

A monolayer of self-assembled silica particles can be imprinted into a silicon substrate by laser irradiation (KrF excimer laser, λ=248 nm). Periodical hemispherical cavities can be therefore created on the substrate surface. The influences of various particle sizes and laser fluence were investigated. In addition, preheating of the substrate significantly improves the performance. One-dimensional thermal calculation was employed to understand the thermal effect in this process. Three-dimensional optical simulation provided an accurate insight into the light intensity enhancement. Raman spectroscopy was used to examine the stress induced by the laser imprinting process resided in the cavity structures.