Graduate Studies


Date of this Version

Fall 11-2014


Hou, Wenjia. "Graphene Synthesis on Dielectric Substrates via Rapid Thermal Annealing Process" MS thesis, University of Nebraska (2014).


A thesis Presented to the Faculty of The Graduate College at the University of Nebraska In Partial Fulfillment of Requirements For the Degree of Master of Science, Major: Electrical Engineering, Under the Supervision of Professor Yongfeng Lu. Lincoln, Nebraska: December, 2014

Copyright 2014 Wenjia Hou


As the first discovered two-dimensional (2D) crystal, graphene has wide applications in electronic and optoelectronic devices due to its unique properties. Direct formation of high-quality graphene on dielectric surfaces is highly desired for industrial applications. Although the chemical vapor deposition (CVD) of graphene has been widely discussed, the graphene defects which are introduced by the post-growth transfer process still limit the applications of graphene in electronics.

This thesis mainly includes three parts. First, high-quality graphene was directly synthesized via a single-step rapid thermal annealing process (RTP). Second, the factors that influence the graphene quality and the number of graphene layers were identified. The controlled growth of single-layer, double-layer and multi-layer graphene was achieved. Third, the growth mechanism of graphene in this RTP process was investigated. It showed that the formation and decomposition of nickel carbide (Ni3C) during the RTP process is critical for graphene growth.

Adviser: Yongfeng Lu