Mechanical & Materials Engineering, Department of


Date of this Version



United States Patent US 7,541.261 B2 Jun. 2, 2009


US govt doc. Public domain


An electronic apparatus uses a single crystalline silicon Substrate disposed adjacent to a flexible substrate. The electronic apparatus may be a flexible flat panel display, or a flexible printed circuit board. The flexible substrate can be made from polymer, plastic, paper, flexible glass, and stainless steel. The flexible substrate is bonded to the single crystalline substrate using an ion implantation process. The ion implantation process involves the use of a noble gas Such as hydrogen, helium, Xenon, and krypton. A plurality of semiconductor devices are formed on the single crystalline silicon Substrate. The semi conductor devices may be thin film transistors for the flat panel display, or active and passive components for the electronic device.