Effects of Mass Layer Nonuniformity on a Quartz-Crystal Microbalance

Authors

Nan Liu, University of Nebraska-Lincoln
Jiashi Yang, University of Nebraska-LincolnFollow
Weiqiu Chen, Zhejiang UniversityFollow

Date of this Version

2011

Citation

IEEE SENSORS JOURNAL, VOL. 11, NO. 4, APRIL 2011; doi: 10.1109/JSEN.2010.2064297

Comments

Copyright 2010 IEEE

Abstract

We study the effects of the nonuniform thickness of a thin mass layer on a quartz-crystal microbalance. A theoretical analysis is performed on thickness-shear (TSh) vibration of an AT-cut quartz plate with a nonuniform mass layer. Mindlin’s 2-D equation for TSh vibration of a quartz plate is used. An elliptical mass layer with stepped thickness is considered which allows an exact analysis based on the plate equation. Free vibration frequencies and modes are obtained. The effects of the mass layer nonuniformity are examined. Results show that a mass layer thicker at the center tends to confine more modes under the mass layer and push the distribution of the TSh displacement toward the center.