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KrF excimer laser-assisted combustion-flame deposition of diamond films

Y.X. Han, University of Nebraska - Lincoln
Hao Ling, University of Nebraska - Lincoln
Yongfeng Lu, University of Nebraska - Lincoln

Document Type Article

Published in JOURNAL OF APPLIED PHYSICS 100, 124911 2006. © 2006 American Institute of Physics. Used by permission.

Abstract

Cobalt (Co) composition has detrimental effects on the deposition of diamond films on cemented tungsten carbide (WC-Co) substrates. It decreases adhesion of the deposited films to the substrates and causes a transformation of sp3-bonded diamond to sp2-bonded graphite. In this study, a KrF excimer laser with a wavelength of 248 nm, a pulse width of 23 ns, and a pulse energy range of 84–450 mJ was used in the combustion-flame method to improve the quality of the deposited diamond films. Scanning electron microscopy, energy dispersive x-ray analysis, and Raman spectroscopy of the deposited films showed that a laser irradiation during combustion-flame deposition of diamond decreased the cobalt composition drastically. Based on the experimental results, the influence of the laser irradiation on the deposition process was analyzed.