Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties

Authors

Sy_Hwang Liou, University of Nebraska-LincolnFollow
M. Hong, AT&T Bell Laboratories, Murray Hill, New Jersey
J. Kwo, AT&T Bell Laboratories, Murray Hill, New Jersey
B.A. Davidson, AT&T Bell Laboratories, Murray Hill, New Jersey
H.S. Chen, AT&T Bell Laboratories, Murray Hill, New Jersey
S. Nakahara, AT&T Bell Laboratories, Murray Hill, New Jersey
T. Boone, AT&T Bell Laboratories, Murray Hill, New Jersey
R.J. Felder, AT&T Bell Laboratories, Murray Hill, New Jersey

Date of this Version

May 1988

Comments

Published by American Institute of Physics. Appl. Phys. Lett. 52, 1735 (1988). © 1988 American Institute of Physics. Permission to use. Journal home page = http://jap.aip.org/jap/.

Abstract

High T_c superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y₂O₃, BaF₂, and CuO powders. Transport measurements of the films showed a sharp resistive T_c (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO₃ substrates (100) or (110) and followed by a post O₂ annealing at 825 °C.