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We investigated magnetic properties and L10 phase formation of FePt films by rapid thermal annealing (RTA) and high current-density ion-beam irradiation. The sample prepared by RTA at 550 °C has (001) texture and strong magnetic perpendicular anisotropy with Hc equal to 6 kOe. The sample irradiated at 5.04 µA/cm2 has Hc equal to 10 kOe but has isotropic magnetic properties due to the (111) texture. The magnetic correlation length of the ion-irradiated sample was about twice as large as that of the RTA sample. This may be due to the inhomogeneity of the L10 phase formation in the ion-irradiated film.