Date of this Version
Pub. No.: US 2005/0147147 A1
A method and apparatus to generate a beam of coherent light including X-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a Syn chronized laser pulse. Applications include X-ray and EUV lithography, protein Structural analysis, plasma diagnostics, X-ray diffraction, crack analysis, non-destructive testing, Surface Science and ultrafast Science.