Combined Use of Oscillating Means and Ellipsometry to Determine Uncorrelated Effective Thickness and Optical Constants of Material Deposited From a Fluid

Authors

John A. Woollam, University of Nebraska-LincolnFollow
James D. Welch, Omaha, NE

Document Type

Article

Date of this Version

4-24-2007

Comments

United States Patent Number: US 7,209,234 B2. Date of Patent: Apr. 24, 2007.

Abstract

A combined ellipsometer and oscillator system applied to a chamber for containing fluid, and method of decorrelated determination of thickness and optical constants of depostable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.