Electrical and Computer Engineering, Department of
Department of Electrical and Computer Engineering: Faculty Publications
Accessibility Remediation
If you are unable to use this item in its current form due to accessibility barriers, you may request remediation through our remediation request form.
Document Type
Article
Date of this Version
8-7-2007
Abstract
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
Comments
United States Patent NO.: US 7,253,900 B1. Date of Patent: Aug. 7,2007.