Broadband Ellipsometer Or Polarimeter System Including at Least One Multiple Element Lens

Authors

Martin M. Liphardt, Lincoln, Nebraska
Blaine D. Johs, Lincoln, Nebraska
Jeffrey S. Hale, Lincoln, Nebraska
Craig M. Herzinger, Lincoln, Nebraska
Steven E. Green, Lincoln, Nebraska
Ping He, Lincoln, Nebraska
John A. Woollam, University of Nebraska-LincolnFollow

Document Type

Article

Date of this Version

5-8-2007

Comments

United States Patent NO.: US 7,215,424 B1. Date of Patent: *May 8, 2007.

Abstract

Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.