Electrical & Computer Engineering, Department of
Date of this Version
7-17-2007
Abstract
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
7-17-2007
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
Comments
United States Patent NO.: US 7,245,376 B2. Date of Patent: *Jul. 17, 2007.