Electrical Engineering, Department of
Title
Combined Spatial Filter and Relay Systems in Rotating Compensator Ellipsometer/Polimeter
Document Type
Article
Date of this Version
July 2007
Abstract
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
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Comments
United States Patent NO.: US 7,245,376 B2. Date of Patent: *Jul. 17, 2007.