Electrical Engineering, Department of
Date of this Version
July 2007
Abstract
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
July 2007
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
Comments
United States Patent NO.: US 7,245,376 B2. Date of Patent: *Jul. 17, 2007.