Mechanical & Materials Engineering, Department of

 

Document Type

Article

Date of this Version

8-2-2022

Citation

Qu, Y.; Jin, F.; Yang, J. Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors. Micromachines 2022, 13, 1243. https://doi.org/10.3390/ mi13081243

Comments

Open access

Abstract

We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

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