Mechanical & Materials Engineering, Department of
Date of this Version
8-2-2022
Citation
Qu, Y.; Jin, F.; Yang, J. Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors. Micromachines 2022, 13, 1243. https://doi.org/10.3390/ mi13081243
Abstract
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
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Mechanics of Materials Commons, Nanoscience and Nanotechnology Commons, Other Engineering Science and Materials Commons, Other Mechanical Engineering Commons
Comments
Open access