Chemical and Biomolecular Engineering Research and Publications
Date of this Version
5-2-2000
Citation
United States patent no. 6,057,628; May 2, 2000
Abstract
Disclosed is a piezoelectric system which demonstrates piezoelectric properties over a large temperature range of from room temperature to approximately 1,360 degrees Centigrade. The piezoelectric system sequentially comprises a first electrically conductive layer, a layer of Ta2O5) in other than a monoclinic phase, (preferably orthorhombic demonstrating small X-ray crystallographic < 0 0 1> and < 1 11 0> peaks), and a second electrically conductive layer. A preferred method of fabrication involves sputter deposition of both said layer of Ta2O5 and said second electrically conductive layer.
Comments
United States government work