Computer Science and Engineering, Department of

 

Document Type

Article

Date of this Version

2020

Citation

United States Patent Alsaleem et al. Patent No.: US 10,771,040 B2

Abstract

Systems and methods to amplify the response of a MEMS micro-oscillator by driving the MEMS device at its electrical and mechanical resonance frequencies, simultaneously. This enhances the MEMS mechanical sensitivity to electrical excitation and increases the voltage across the MEMS capacitor. Moreover, using a combination of two input signals at different frequencies (beat signal) may be used to achieve double resonance in any MEMS device, even if its natural frequency is far from its electrical resonance.

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