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Optoplasmonic Properties of Heterostructure Metamaterials Fabricated Using Glancing Angle and Atomic Layer Deposition Techniques & Analyzed Using Finite Element and Spectroscopic Ellipsometry Methods
Abstract
Advancements in nanotechnology enable precise manipulation of materials on the atomic or molecular scale, creating unique material and physical properties compared to their bulk counterparts. Achieving enhanced tunability of these properties necessitates the use of multiple materials during nanostructure fabrication. Although such nano-engineered materials can be used in a plethora of diverse emerging classical and quantum optical applications, their fabrication procedures often limit their use in industrial applications. It is mainly because the experimental realizations of proposed structures were predominantly performed by using lithography techniques. During the last decade, the glancing angle deposition (GLAD) technique, has gained enormous interest due to its superior abilities over the highly complicated top-down fabrication methods. GLAD provides a simplistic route to obtain heterostructures with various 3D nanomorphologies over a large-scale area. Moreover, atomic layer deposition (ALD) offers excellent thickness control and uniform and conformal coating over even high aspect ratio structures. This allows an additional angle of freedom in further engineering the nanostructures so-called core-shell type metamaterials. A systematic theory-driven, application-oriented experimental fabrication, characterization, and verification method is forming the main framework of this dissertation. This complicated multi-step process enables to reach heterostructure metamaterials that exhibit pronounced material properties. Hence, in this thesis, several subwavelength scale, axially and spatially coherent, super-lattice type, heterostructure designs were successfully fabricated using a combined GLAD and ALD techniques with their optoplasmonic properties explored using spectroscopic ellipsometry and finite element simulation methods. Additionally, to investigate the structural, morphological, crystallinity, and chemical composition properties of the fabricated structures, several other material characterization techniques were utilized. This includes atomic force microscopy, scanning electron microscopy, energy-dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and X-ray diffraction methods.
Subject Area
Nanoscience|Nanotechnology|Optics
Recommended Citation
Kilic, Ufuk, "Optoplasmonic Properties of Heterostructure Metamaterials Fabricated Using Glancing Angle and Atomic Layer Deposition Techniques & Analyzed Using Finite Element and Spectroscopic Ellipsometry Methods" (2021). ETD collection for University of Nebraska-Lincoln. AAI28713470.
https://digitalcommons.unl.edu/dissertations/AAI28713470