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ELLIPSOMETRIC STUDY OF CLEANING SILICON BY ION BOMBARDMENT AND HEATING INULTRA HIGH VACUUM

MAGDI MAHMOUD M IBRAHIM, University of Nebraska - Lincoln

Abstract

Abstract not available

Subject Area

Electrical engineering

Recommended Citation

IBRAHIM, MAGDI MAHMOUD M, "ELLIPSOMETRIC STUDY OF CLEANING SILICON BY ION BOMBARDMENT AND HEATING INULTRA HIGH VACUUM" (1971). ETD collection for University of Nebraska-Lincoln. AAI7215992.
https://digitalcommons.unl.edu/dissertations/AAI7215992

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