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ELECTRICAL AND OPTICAL PROPERTIES OF "DIAMONDLIKE" CARBON FILMS (SILICON SUBSTRATES, ION BEAM SPUTTERING, RF GLOW DISCHARGE)
Abstract
Hard, insulating, amorphous-carbon films have been deposited on single crystal silicon substrates using ion beam sputtering, rf glow discharge in methane and dc sputtering of a graphite target in an Ar ambient. Electrical and optical properties of these films have been studied. The interfacial electrical properties have been evaluated using MIS capacitance and conductance measurements both as a function of gate voltage with frequency being a parameter, and as a function of frequency with gate voltage being a parameter. For ion beam sputtered films, equivalent parallel conductance data showed a good fit to theory only if either a single time constant or else a continuum of states is assumed. Commonly observed anomalous dispersion of time constants was not noted in these samples. For MIS samples made with dc sputtered amorphous-carbon film, the data indicated a tunnelling type of mechanism for the observed ac loss. Measurements for these samples were taken both under dark and various lighting conditions in the frequency range of 100 Hz to 10 MHz. For both (ion beam and dc sputtered) types of samples, density of interface states has been evaluated and found to be fairly low from a device point of view. Optical constants of ion beam sputtered and rf glow discharge deposited films have been determined using multiple wavelength, multiple angle of incidence measurement technique of null ellipsometry. All measurements were four zone and the wavelength range was 253.6 nm to 632.8 nm. Both as-prepared and annealed samples were used. It was found that the refractive index and the extinction coefficient show only a minimal systematic change as the samples are annealed up to 500(DEGREES)C.
Subject Area
Electrical engineering
Recommended Citation
KHAN, ABDUL AZIM, "ELECTRICAL AND OPTICAL PROPERTIES OF "DIAMONDLIKE" CARBON FILMS (SILICON SUBSTRATES, ION BEAM SPUTTERING, RF GLOW DISCHARGE)" (1983). ETD collection for University of Nebraska-Lincoln. AAI8328175.
https://digitalcommons.unl.edu/dissertations/AAI8328175